Standard Test Method for Measuring Resistivity of Silicon Wafers Using a Spreading Resistance Probe (Withdrawn 2003) (Includes all amendments And changes 8/16/2017).
NORMA vydána dne 10.12.2000
Designation standards: ASTM F525-00a
Note: NEPLATNÁ
Publication date standards: 10.12.2000
The number of pages: 14
Approximate weight : 42 g (0.09 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM
Keywords:
calibration, epitaxial layer, resistivity, silicon, spreading resistance, spreading resistance probe, ICS Number Code 29.045 (Semiconducting materials)