ASTM F374-00a

Standard Test Method for Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon, and Ion-implanted Layers Using an In-Line Four-Point Probe with the Single-Configuration Procedure (Includes all amendments And changes 8/16/2017).

NORMA vydána dne 10.12.2000

Anglicky -
Online zabezpečené PDF (1994.50 CZK)

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Tištěné (1994.50 CZK)

The information about the standard:

Designation standards: ASTM F374-00a
Note: NEPLATNÁ
Publication date standards: 10.12.2000
The number of pages: 17
Approximate weight : 51 g (0.11 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM

Annotation of standard text ASTM F374-00a :

Keywords:
collinear four-probe array, diffused layer, epitaxial layer, four-point probe method, implanted layer, Ion-implanted layer, probe methods-four-point probe, resistance (electrical)-semiconductors, sheet resistance, silicon semiconductors, sheet resistance-Si-epitaxial/diffused/ion-implanted layers, using, in-line four-point probe, ICS Number Code 29.045 (Semiconducting materials)