ASTM F1894-98

Test Method for Quantifying Tungsten Silicide Semiconductor Process Films for Composition and Thickness

NORMA vydána dne 10.5.1998

Anglicky -
Online zabezpečené PDF (1774.40 CZK)

The information about the standard:

Designation standards: ASTM F1894-98
Note: NEPLATNÁ
Publication date standards: 10.5.1998
The number of pages: 7
Approximate weight : 21 g (0.05 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM

Annotation of standard text ASTM F1894-98 :

Keywords:
analysis of tungsten silicide, backscattering analysis, composition, metallization films, quantitative analysis, RBS, Wsix, ICS Number Code 29.045 (Semiconducting materials)