Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications
NORMA vydána dne 10.12.2002
Designation standards: ASTM F1709-97(2002)
Note: NEPLATNÁ
Publication date standards: 10.12.2002
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM
Keywords:
coating, sputtering, target, thin film, titanium, ICS Number Code 31.120 (Electronic display devices)