ASTM F1618-02

Standard Practice for Determination of Uniformity of Thin Films on Silicon Wafers (Withdrawn 2003)

NORMA vydána dne 10.5.2002

Anglicky -
Online zabezpečené PDF (1774.30 CZK)

The information about the standard:

Designation standards: ASTM F1618-02
Note: NEPLATNÁ
Publication date standards: 10.5.2002
The number of pages: 7
Approximate weight : 21 g (0.05 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM

Annotation of standard text ASTM F1618-02 :

Keywords:
dielectric layers, epitaxial layers, ion implant, metal films, sampling plans, semiconductor, silicon, thin films, uniformity, ICS Number Code 29.045 (Semiconducting materials)