ASTM F1528-94(1999)

Standard Test Method for Measuring Boron Contamination in Heavily Doped N-Type Silicon Substrates by Secondary Ion Mass Spectrometry (Withdrawn 2003)

NORMA vydána dne 10.12.1999

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The information about the standard:

Designation standards: ASTM F1528-94(1999)
Note: NEPLATNÁ
Publication date standards: 10.12.1999
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM

Annotation of standard text ASTM F1528-94(1999) :

Keywords:
boron, epitaxial substrate, silicon, SIMS, ICS Number Code 29.045 (Semiconducting materials)