Standard Guide for Application of Certified Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon (Withdrawn 2003)
NORMA vydána dne 10.7.2002
Označení normy: ASTM F1527-02
Poznámka: NEPLATNÁ
Datum vydání normy: 10.7.2002
Počet stran: 15
Přibližná hmotnost: 45 g (0.10 liber)
Země: Americká technická norma
Kategorie: Technické normy ASTM
Keywords:
certified reference materials, control chart, eddy current gage, four-point probe method, mercury probe, reference materials, resistivity, resistivity reference wafer, semiconductor, sheet resistance, silicon wafers, SPC, spreading resistance probe, Standard Reference Materials, ICS Number Code 29.045 (Semiconducting materials)