Standard Guide for Application of Silicon Standard Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon
NORMA vydána dne 10.6.2000
Označení normy: ASTM F1527-00
Poznámka: NEPLATNÁ
Datum vydání normy: 10.6.2000
Počet stran: 15
Přibližná hmotnost: 45 g (0.10 liber)
Země: Americká technická norma
Kategorie: Technické normy ASTM
Keywords:
Calibration-semiconductor analysis instrumentation, Control chart, Eddy current gage, Four-point probe method, Mercury probe, Probe methods-four-point probe, Probe methods-spreading resistance probe, Reference materials (RM), Resistance (electrical)-semiconductors, Resistivity reference wafer, Sheet resistance, Silicon semiconductors, Silicon semiconductors-slices/wafers, SPC, Spreading resistance probe, Standard reference materials (SRM)