Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications (Withdrawn 2020)

Informace o normě:

Označení normy: ASTM F1238-95(2011)
Poznámka: NEPLATNÁ
Datum vydání normy: 1.6.2011
Počet stran: 3
Přibližná hmotnost: 9 g (0.02 liber)
Země: Americká technická norma
Kategorie: Technické normy ASTM

Anotace textu normy ASTM F1238-95(2011) :

Keywords:
density, microelectronics, molybdenum disilicide, refractory silicides, sputtering, sputtering targets, tantalum disilicide, titanium disilicide, tungsten disilicide, Electrical conductors (semiconductors)--specifications, Electronic materials/applications--specifications, Metallic silicide, Molybdenum (electronic applications)--specifications, Polycaprolactone (PCL), Refractory silicide targets, Silicides, Tantalum (Ta)/tantalum alloys--specifications, Targets, Titanium silicide