ASTM F1228-89(1994)E01

Test Method for Oxidizable (Organic) Carbon on Wafer Surfaces (By Persulfate) (Withdrawn 2001)

NORMA vydána dne 1.1.1994

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The information about the standard:

Designation standards: ASTM F1228-89(1994)E01
Note: NEPLATNÁ
Publication date standards: 1.1.1994
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM

Annotation of standard text ASTM F1228-89(1994)E01 :

Keywords:
Carbon content-semiconductors, Contamination-semiconductors, Electrical conductors-semiconductors, Microelectronics industry, Organic carbon (OC), Oxidizable carbon, Persulfate oxidation, Semiconductor device testing, Silicon semiconductors, Silicon semiconductors-slices/wafers, wafer surfaces-mass of deposited organic (oxidizable) carbon, contaminants, by persulfate oxidant solution, test