ASTM F1152-93

Standard Test Method for Dimensions of Notches on Silicon Wafers

NORMA vydána dne 10.1.2002

Anglicky -
Online zabezpečené PDF (1574.90 CZK)

The information about the standard:

Designation standards: ASTM F1152-93
Note: NEPLATNÁ
Publication date standards: 10.1.2002
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM

Annotation of standard text ASTM F1152-93 :

Keywords:
notch, notch dimension, optical comparator, silicon, wafer