Standard Practice for Scanning Electron Microscope Beam Size Characterization
NORMA vydána dne 1.7.2004
Designation standards: ASTM E986-04
Note: NEPLATNÁ
Publication date standards: 1.7.2004
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM
Keywords:
electron beam size, E 766, graphite fiber, magnification, NIST-SRM 2069B, resolution, SEM, SEM performance, spot size, waveform, ICS Number Code 31.120 (Electronic display devices), 37.020 (Optical equipment)