Terminology Relating to Measurements Taken on Thin, Reflecting Films (Includes all amendments And changes 5/28/2018).
NORMA vydána dne 15.10.2011
Designation standards: ASTM E2444-11e1
Note: NEPLATNÁ
Publication date standards: 15.10.2011
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM
Keywords:
cantilevers, definitions, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, stiction, strain gradient, terminology, test structure, ICS Number Code 01.040.31 (Electronics (Vocabularies)), 31.240 (Mechanical structures for electronic equipment)