Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer

Informace o normě:

Označení normy: ASTM E2246-11
Poznámka: NEPLATNÁ
Datum vydání normy: 1.11.2011
Počet stran: 21
Přibližná hmotnost: 63 g (0.14 liber)
Země: Americká technická norma
Kategorie: Technické normy ASTM

Anotace textu normy ASTM E2246-11 :

Keywords:
cantilevers, combined standard uncertainty, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, round robin, stiction, strain gradient, test structure, Alignment, Calibration--metals/alloys analysis instrumentation, Cantilever testing, Combined standard uncertainty, Fixed-fixed beams, Interferograms/Interferometry, Length, Microelectromechanical systems (MEMS), Noncontacting optical strain measurement systems